Surface modification of Ti-6Al-4V alloy controlling OCP nucleation by electron cyclotron resonance plasma oxidation

摘要

Ti-6Al-4V alloy is used by dentistry and orthopedics as an implant material, since it is excellent in biocompatibility or mechanical property. It is known that the biocompatibility of Ti will change with the condition of the surface oxide (titania: TiO_2) film of implant Ti alloy. However, since the thermal expansion difference of Ti and TiO_2 is large, it is difficult to deposit the good TiO_2 film on Ti alloy at low temperature for a short time. Electron cyclotron resonance (ECR) plasma is high-active plasma, and high-quality crystalline films can be obtained at low temperature for short time. ECR plasma oxidation is effective surface modification of metal Ti for biocompatibilities, which became clearly in previous study[1]. Our previous studies indicated that implantation of octacalcium phosphate [Ca_8H_2(PO_4)_6 • 5H_2O, OCP] was efficiently enhanced bone regeneration compared to HAp [2l In the present study, TiO_2 films were deposited on Ti-6Al-4V alloy by ECR plasma oxidation, and the effect of oxidation conditions on structure and precipitation behavior of OCP were investigated.