Preparation and mechanical properties of titania film on metal titanium by electron cyclotron resonance plasma oxidation

摘要

Metal Ti is used by dentistry and orthopedics as an implant material, since it is excellent in biocompatibility or mechanical property. It is known that the biocompatibility of Ti will change with the condition of the surface oxide (titania: TiO2) film of implant Ti. However, since the thermal expansion difference of Ti and TiO2 is large, it is difficult to deposit the good TiO2 film on Ti at low temperature for a short time. Electron cyclotron resonance (ECR) plasma is high-active plasma and highly quality crystalline films can be obtained at low temperature. On the other hand, calcium phosphate, such as hydroxyapatite, P-tricalcium phosphate and octacalcium phosphate [Ca8H2(PO4)6 ? 5H2O, OCP], are utilized as the coating materials for improving the osteoconductive activity. Our previous studies indicated that implantation of OCP efficiently enhanced bone regeneration compared to HAp[1l In the present study, TiO2 films were deposited on metal Ti by ECR plasma oxidation and the effect of oxidation conditions on structure, mechanical property and precipitation behavior of OCP were investigated.