Highly Crystalline Silicon Thin Films Grown by ECRCVD For The Applications of Crystalline Silicon Solar Cells

机译：通过ECRCVD生长的高结晶硅薄膜用于结晶硅太阳能电池

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Highly crystalline growth of semiconductors at low substrate temperatures has been a fascination of many investigators through the years.Silicon thin films highly doped with phosphor (P) and boron (B) were grown below 200℃ by electron cyclotron resonance chemical vapor deposition (ECR–CVD) on both side of p-type cryatlline Si (c-Si) wafers.

机译：多年来，许多研究人员一直着迷于在低衬底温度下半导体的高结晶生长。通过电子回旋共振化学气相沉积（ECR–），在200℃以下生长了高度掺杂有磷（P）和硼（B）的硅薄膜。 CVD）在p型晶硅Si（c-Si）晶圆的两面。

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来源
《The 22nd International photovoltaic science and engineering conference》|2012年|1|共1页
会议地点 Hangzhou(CN)
作者
C.C.Lee; Y.H.Chu; T.H.Chang; D.P.Cai; J.Y.Chang; Tomi Li;
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作者单位

Optical Science Center, National Central University, Jhongli 320, R.O.C;

Department of Optics and Photonics, National Central University, Jhongli 320, R.O.C;

Department of Optics and Photonics, National Central University, Jhongli 320, R.O.C;

Department of Optics and Photonics, National Central University, Jhongli 320, R.O.C;

Department of Optics and Photonics, National Central University, Jhongli 320, R.O.C;

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正文语种 eng
中图分类太阳能技术;
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1. Back-Surface-Field Effects at the Heterojunctions between Boron-Doped p-Type Hydrogenated Amorphous Silicon and Crystalline Silicon in Thin-Film Crystalline Silicon Solar Cells [J] . Isao SAKATA, Mitsuyuki YAMANAKA, Ryuichi SHIMOKAWA Japanese Journal of Applied Physics. Part 1, Regular Papers, Brief Communications & Review Papers . 2005,第10期

机译：薄膜晶体硅太阳能电池中掺硼的p型氢化非晶硅和晶体硅之间异质结处的后场效应
2. A Novel Method to Make Boron-Doped Microcrystalline Silicon Thin Films with Optimal Crystalline Volume Fraction for Thin Films Solar Cell Applications [J] . Chonghoon Shin, Jinjoo Park, Sangho Kim, Journal of nanoscience and nanotechnology . 2014,第12期

机译：一种制备具有最佳晶体体积分数的掺硼微晶硅薄膜的新方法，用于薄膜太阳能电池应用
3. One-dimensional simulation study of micro crystalline silicon thin films for solar cell and thin film transistor applications using AMPS-1D [J] . Tripathi S, Venkataramani N, Dusane RO, Thin Solid Films . 2006,第1a2期

机译：使用AMPS-1D的用于太阳能电池和薄膜晶体管的微晶硅薄膜的一维模拟研究
4. Highly Crystalline Silicon Thin Films Grown by ECRCVD For The Applications of Crystalline Silicon Solar Cells [C] . C.C.Lee, Y.H.Chu, T.H.Chang, International photovoltaic science and engineering conference . 2012

机译：ECRCVD的高度结晶硅薄膜用于晶体硅太阳能电池的应用
5. Thin film silicon by a microwave plasma deposition technique: Growth and devices, and, interface effects in amorphous silicon/crystalline silicon solar cells. [D] . Jagannathan, Basanth. 1998

机译：通过微波等离子体沉积技术的薄膜硅：非晶硅/晶体硅太阳能电池中的生长和器件以及界面效应。
6. Wafer-Scale Integration of Inverted Nanopyramid Arrays for Advanced Light Trapping in Crystalline Silicon Thin Film Solar Cells [O] . Suqiong Zhou, Zhenhai Yang, Pingqi Gao, 2016

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7. Thin crystalline silicon solar cells based on epitaxial films grown at 165°C by RF-PECVD [O] . Romain Cariou A, Martin Labrune A, P. Roca I Cabarrocas A 2014

机译：基于通过RF-PECVD在165°C下生长的外延膜的薄晶硅太阳能电池
8. High Efficiency, Low Cost Solar Cells Manufactured Using 'Silicon Ink' on Thin Crystalline Silicon Wafers [R] . Antoniadis, H. 2011

机译：在薄晶硅片上使用“硅墨”制造高效率，低成本的太阳能电池

Highly Crystalline Silicon Thin Films Grown by ECRCVD For The Applications of Crystalline Silicon Solar Cells

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