Ultrapure Water Production for Semiconductor Industries from Reclaimed Sewage

摘要

Water is a major and critical utility for the semiconductor industry. Currently, the semiconductor manufacturing facilities in Singapore use potable water supply from Public Utilities Board (PUB) as feed for the generation of ultra pure water (UPW). Our studies are focused on the final UPW quality in terms of TOC, Residual Ionic Impurities, Dissolved Oxygen and Particle Count Levels at the Point of Use, as required by the semiconductor industry, using reclaimed sewage -NEWater as feed. The pilot plant was commissioned by the Centre for Advanced Water Technology (CAWT) and the results were comparable with PUB potable water. The NEWater produced by advanced tertiary treatment, using proven membrane technology, of secondary effluent at Bedok Water Reclamation Demonstration Plant in Singapore could be a source to replace PUB potable water currently used by the semiconductor industry.