Flexible pressure sensor made using PDMS containing carbon nanotubes

摘要

A new concept high sensitivity flexible pressure sensor was proposed that can measure applied pressure using changes in the contact resistance for the first time. This sensor was fabricated with PDMS containing CNTs, CNTs were made to protrude on the surfaces of pyramidal microstructures to maximize the sensitivity of the sensor. It was identified that the fabricated flexible pressure sensor has high-sensitivity in pressure ranges not higher than 250 Pa that occurs when objects are pressed by a finger. The fabricated sensor can accurately sense the sliding feeling on the surfaces of objects in a manner similar to how the skin on human fingers senses.