Electrically driven ion transport in nanopores fabricated by metal assisted chemical etching method

摘要

This work reports the electrically driven ion transport in nanopores fabricated by a metal assisted chemical etching (MACE) method. The nanopores with approximate 15 nm diameter and 200 μm height were successful produced by MACE. Ion transport through nanopores was observed and could be controlled by application of gate voltages to nanopores.