Experimental validation of diaphragms for acoustic micro-transducers

摘要

The electro-mechanical characterization of MEMS diaphragms for acoustic applications is introduced in this paper. The samples under test are fabricated with the 0.35 AMS CMOS process with front-side surface etching post-process. The goals of the experimental activities are to verify the performances and repeatability of fabrication process and to identify the static and dynamic properties of diaphragms in comparison to the predictions of FEM models. In order to verify the applicability of this kind of devices to acoustic applications, the pressure generation in air has been measured with a measuring microphone with appreciable results.