DIAPHRAGM STRUCTURE, MICRO-TRANSDUCER AND THEIR MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a diaphragm structure having a high yield, a micro- transducer and a method for manufacturing them.;SOLUTION: The method for manufacturing the diaphragm structure comprises the steps of forming body parts 30A and 30B and diaphragms 31A and 31B of diaphragm constituting elements by using a normal semiconductor process on first and second substrates 1A and 1B via a mold release layer 2. The method further comprises the steps of connecting and transferring the parts 30A and 30B to a target substrate 11, connecting and transferring the diaphragms 31A and 31A to the parts 30A and 30B. Thus, the diaphragm structure in which a cavity is formed between the substrate 11 and the diaphragms 31A, 31B is completed.;COPYRIGHT: (C)2002,JPO