首页> 外文会议>2015 Joint Conference of the IEEE International Frequency Control Symposium amp; European Frequency and Time Forum >Analysis of the impact of release area on the quality factor of contour-mode resonators by laser Doppler vibrometry
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Analysis of the impact of release area on the quality factor of contour-mode resonators by laser Doppler vibrometry

机译:激光多普勒振动分析释放区域对轮廓模式谐振器品质因数的影响

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Energy dissipation through the anchors of an aluminum nitride (AlN) MEMS contour-mode resonator (CMR) plays an important role in setting the device quality factor at frequencies under 500MHz [1]. The acoustic energy leaving the resonator is effected, not only by the anchor, but also the portion of the surrounding device layer that has been released from the substrate during fabrication. Typical device simulations used for design do not take into account the motion of this additional area. Using laser Doppler vibrometery and COMSOL simulations we show a variation in device Q by 28% as a result of the motion of this released region.
机译:通过氮化铝(AlN)MEMS轮廓模式谐振器(CMR)的锚的能量耗散在将器件质量因子设置为500MHz以下的频率方面起着重要作用[1]。离开谐振器的声能不仅受到锚固件的影响,而且还受到周围器件层在制造过程中已从基板释放的部分的影响。用于设计的典型设备仿真未考虑此额外区域的运动。使用激光多普勒振动计和COMSOL仿真,由于该释放区域的运动,我们显示出设备Q的变化为28%。

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