Fabrication of perpendicular magnetic anisotropic Nd-Fe-B based thin films through annealing Nd-Fe-B/Nd-Fe multilayer

摘要

This study presents a way of achieving high perpendicular coercivity by post-annealing Ta/NdFeB/NdFe/NdFeB/Ta multilayer films deposited by evaporation method on Si substrate at 650°C. The demagnetization curves of the multilayer film have shoulders close to zero applied field, indicating that there exist some soft magnetic phases in the film. Microstructure characterization is carried out to understand the coercivity mechanism. The strong perpendicular magnetic anisotropy of the film is mainly attributed to the partial textured structure, which is confirmed by micromagnetic simulation.