In this study, the magnetic properties of thin films prepared by sputtering are presented, before and after submission to current annealing [1]. Three compositions of soft magnetic materials are investigated: CoFeSiB, FeSiB, FeSiPBCu. Hysteresis loops and magnetic domain imaging (MOKE, MFM), together with structural techniques (EDX, TEM, XRD), are used to follow the effects of annealing, which include stress relaxation and crystallization .
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