Magnetic field sensor using sensing elements of thin film patterns fabricated though the treatment controlling soft magnetic properties and magnetic anisotropy by the heat and magnetic field generated during flowing current through the pattern

摘要

PURPOSE: A magnetic sensor including a sensing element of a thin film pattern is provided to improve soft magnetic properties and magnetic anisotropic by performing heat treatment and the magnetic anisotropy process. CONSTITUTION: A magnetic sensor including a sensing element of a thin film pattern fabricated by heat and magnetic anisotropy process includes a non-conductive substrate(11) and one or more magnetic film patterns(12,13). The magnetic film patterns(12,13) are formed on an upper surface of the nonconductive substrate. The magnetic film patterns(12,13) are formed by the heat and the magnetic field generated from the applied current. The magnetic film patterns(12,13) are formed with one of Fe-Ni, Fe-Si-Al, Co-Nb-Zr, Fe-Hf-C, Fe-Cu-Nb-Si-B, Co-Fe-Si-B, C0-Fe-Ni-Si-B, and Fe-Si-N.