Silver nanoparticles stamping for the production of fabrics-based bio-MEMS

摘要

This paper describes the developments of Bio-MEMS using fabric as the structural components. The use of fabrics for Bio-MEMS construction significantly simplifies the conventional fabrication process. In this paper we proposed a new fabrication process for fabrics-based Bio-MEMS. In addition, to the simple and low-cost fabrication process, stamping method offers a number of advantages which is less complicated and less of procedure steps during the fabrication process as a result reducing fabrication time and less amount of nanomaterial used. We demonstrate the gauge factor for fabrics-based Bio-MEMS is 7.424 which are results in higher sensitivity. By utilizing the concept of MEMS technology, fabrics-based Bio-MEMS will be recommended to become employed for activity monitoring and control especially in rehabilitations therapy.