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Microstructural, nanomechanical and tribological properties of ZrAlN thin films prepared by pulsed DC magnetron sputtering

机译:脉冲直流磁控溅射制备ZrAlN薄膜的微观结构,纳米力学和摩擦学性能

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摘要

An investigation on the structural, nano-mechanical and tribological properties of thin films of ZrAlN deposited on (100) Si and D-9 alloy substrates prepared by pulsed DC magnetron is reported. Zr1-xAlxNy films have been studied with the Al concentration range of 0
机译:研究了在脉冲直流磁控管制备的(100)Si和D-9合金基底上沉积的ZrAlN薄膜的结构,纳米机械和摩擦学性能。研究了Zr1-xAlxNy薄膜,其Al浓度范围为0

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