Design and simulation of a novel microgripper with capability to vibrate end-effectors for releasing nano particles

摘要

This paper investigates the design and simulation of a novel microgripper which is able to release nano particles by vibration. After picking and transferring the object to the desirable substrate electrothermally, an electrostatic oscillation system (interdigited comb-drive system) generates vibration at the gripper arms that facilitates the release process by taking advantage of inertial effects.