We report on the design, simulations and optimization of 5–20kV GaN and SiC vertical superjunction structures. The space charge in the GaN and SiC superjunction pillars have been optimized using superjunction p-n diode, and the best trade-off between breakdown voltage (BV) and specific on-resistance (Ron, sp) have been obtained by varying the pillar dosage, length and width.
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