We have developed the T-R-T type ESD/EMI filter using new transient voltage suppressor (TVS) Zener diodes and the epitaxy-based IPD technology. The performance of the filter has been examined in terms of I-V, s-parameter, and LFN properties. The properties demonstrated that the filter kept consistency in the excellent ESD robustness over the MM ±4 kV.
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School of Semiconductor and Chemical Engineering, Semiconductor Physics Research Center, Chonbuk National University, Jeonju 561-756, Republic of Korea;