Micro probe array fabrication by using the microlens array mask through proximity printing

摘要

This study presents a novel and precision process to fabricate an array of micro metal probes. The process includes microlens array mask with the proximity printing in ultraviolet (UV) lithography and Ni electroforming technology. The tip formation of micro cone probe array utilizes the microlens array mask through geometrical optics. Due to the light pass through a microlens, a microlens has a focal point. The simulated results of various focal lengths using different diameter of microlenses, the different photoresist microcone probe array molds can be fabricated. The micro cone probe array will have great potential in the area of field emission display applications.