首页> 外文会议>2011 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS >Stress identification of thin membrane structures by dynamic measurements
【24h】

Stress identification of thin membrane structures by dynamic measurements

机译:通过动态测量识别薄膜结构

获取原文
获取原文并翻译 | 示例

摘要

A fast identification method of membrane stresses is investigated for an early stage of the manufacturing process. The approach consists of performing optical measurement of the out-of-plane modal responses of the membrane. This information is used in an inverse identification algorithm based on a FE model by an optimization.
机译:在制造过程的早期阶段就研究了膜应力的快速识别方法。该方法包括对膜的平面外模态响应进行光学测量。通过优化,该信息被用于基于FE模型的逆识别算法中。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号