Sensitivity to Shape and Membrane Thickness Variations in Capacitive Pressure Sensors

摘要

This study describes the effect of variations in shape and membrane thickness in capacitive pressure sensors. Specifically, square, rectangular and circular shapes were considered with three different membrane thicknesses. Capacitive changes and membrane deformations with respect to pressure variation were computed using the IntelliSuite simulation software, and the sensitivity of the sensor was assessed. Square-shaped pressure sensor with least membrane thickness was found to be more sensitive than the circular and rectangular shaped sensors, with the rectangular one showing the least sensitivity.