Progress in MEMS and Micro Systems Research

摘要

MEMS technology has revoluntionized microfabrication, and the sensors and actuators industries. Whatrnis the state of the art of MEMS applications that use ceramic materials? What are major trends ofrndevelopment for the MEMS field in the future? This talk will present a broad and timely overview forrnconference attendees that address these twoquestions.