Modeling of a Self-Retracting Fully-Compliant Bistable Micromechanism

摘要

The purpose of this paper is to demonstrate how a combination of models facilitated the development of a new class of small displacement fully-compliant bistable micro-mechanisms (Self-Retracting Fully-compliant Bistable Micromechanism, or SRFBM). Two different Pseudo-Rigid-Body Models (PRBM) were used in the early stages to determine the basic form of the device. The use of these models allowed bistable configurations to be rapidly identified. Subsequent finite element modeling concentrated on tailoring the devices for specific behaviors. Furthermore, finite elements models were instrumental in predicting the thermal self-retracting behavior of the mechanism. Suitable designs have been fabricated and tested for functionality and endurance. Total travel of the devices is 8.5 μm. Bistability, including on-chip actuation and thermal self-retraction has been demonstrated, as well as fatigue testing in excess of 2 million cycles. On-chip force testing has correlated well with model predictions.