CONFORMAL ULTRA-THIN NON-CONDUCTING COATINGS ON CONDUCTING FINE METAL PARTICLES

摘要

Fine nickel metal particles are coated by atomic layer deposition (ALD) in a fluidized bed reactor. Conformal coatings of alumina can be placed on the nickel particles and controlled to a thickness of～ 0.1 nanometers. The coatings are chemically reacted to the surface of the metal.