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Modeling of Skin and Proximity Effects in RF-MEMS Spiral Inductors by Partial Element Equivalent Circuits

机译:利用部分元件等效电路对RF-MEMS螺旋电感器的趋肤效应和邻近效应建模

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摘要

Frequency-dependent series resistance caused by skin and proximity effects in spiral inductors are analyzed by partial element equivalent circuits (PEEC). Spiral inductor is modeled as many conducting segments and the non-uniform current distribution on the cross section of metal strip is considered. Impact of width and thickness of metal strip to resistance and inductance is discussed.
机译:由部分元件等效电路(PEEC)分析了由螺旋感应器中趋肤效应和邻近效应引起的频率相关串联电阻。将螺旋电感器建模为许多导电段,并考虑了金属条横截面上的不均匀电流分布。讨论了金属带的宽度和厚度对电阻和电感的影响。

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