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Using DLC buffer layer to improve the effect of surface modification of RB-SiC mirror by SiC coating

机译:使用DLC缓冲层改善SiC涂层对RB-SiC镜面的表面改性效果

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摘要

A DLC buffer layer was used to improve the surface modification of RB-SiC mirror by SiC coating. The surface roughness of the RB-SiC mirror was reduced from 1. 397nm (rms) to 0. 774 nm (rms) by this method.
机译:DLC缓冲层用于通过SiC涂层改善RB-SiC镜的表面改性。通过这种方法,RB-SiC反射镜的表面粗糙度从1. 397nm(rms)降低到0. 774 nm(rms)。

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