A Novel H_2 Gas Sensor Using Amorphous (Ba,Sr)TiO_3 and Pb(Zr,Ti)O_3 Thin Films and Its Mechanism Study

摘要

(Ba,Sr)TiO_3 and Pb(Zr,Ti)O_3 thin films have been prepared for hydrogen gas detection using the sol-gel and RF sputtering technology. Experimental results show that the hydrogen-sensitive leakage current is influenced significantly both by the microstructure of thin films and by their compositions. The amorphous BST and PZT thin films exhibit the promising electrical properties for hydrogen detecting devices. Studies on the transient response and impedance spectra provide substantial evidence for our proposed model regarding proton-blocking at Pd/ferroelectric interface, and the gas sensing mechanism is further elucidated.