Development and Testing of air purifier using UV irradiation

摘要

Our group has been studying on the removal of gaseous contaminants using UV irradiation as the solution of gaseous contaminants in the semiconductor cleanroom. From the study carried out up to now, it was confirmed that substances such as organic compounds are reduced when the air is irradiated with UV light. The purpose of this paper is to evaluate a cleaning technology using UV irradiation, with providing an air washer in pre-stage and a cooler in post-stage of UV irradiating unit.