A magnetic PDMS micropump for implantable drug delivery application

摘要

This paper presents an integrated magnetic PDMS-membrane micropump for implantable drug delivery application.The micropump mainly consists of two functional PDMS layers: one integrating microchannels,a pump chamber and two planar check valves into a single layer,allowing for simple design and easy system integration,and the other covering the chamber and holding a thin electroplated permalloy piece on top for magnetic actuation.The micropump can be driven by the interaction between the ferromagnetic permalloy piece and an external electromagnet,providing a remote and wireless operation method.Test results demonstrate that this micropump is able to produce a maximal flow rate of 0.15 μL/min at the driving frequency of 2 Hz,demonstrating its ability to deliver fluid samples with a volume resolution of approximately 1 nL,promising its application in various implantable biomedical systems.