Basic Characteristics of Hollow Piezoelectric Actuator for Positioning Nanoscale Stamp

摘要

Nanoimprinting lithography has been actively investigated, which can replicate nano-patterned master stamp into wafer and so on. In this study, a square-shaped hollow piezoelectric actuator is presented, which is newly devised instead of conventional electric motor for driving nanoscale stamp in nanoimprint lithography. The 95-layered prototype hollow piezoelectric actuator is fabricated with the side lengths of 23mm and 18mm for outer and inner squares. By applying a novel process instead of conventional forming process to fabricate one layer actuator, the one layer is composed of 4 rectangular segments produced by sawing a ceramic film with the thickness of 0.3mm. Basic characteristics on displacement and generation force of the fabricated prototype are experimentally investigated. From the experimental results, maximum displacement of 17 μm and maximum force of 16N are obtained with the driving voltage of 300V.