Design and preparation of polymer components for microspectrometer on the chip

摘要

In this paper, we present design and preparation of polymer components for microspectrometer fabrication on a chip. The graphical program was used to design novel components in 3D arrangement. In experimental we used two-photon polymerization for direct writing of designed structures in IP-Dip photoresist material. Shape and morphological properties of prepared devices were investigated by scanning electron microscope (SEM). Finally, optical properties were examined by diffraction measurement with red laser.