INTRODUCTION TO (S)TEM AND ELECTRON DIFFRACTION IN THE TEM

摘要

All varieties of electron microscopes produce magnified images of the samples with the help of electrons. However, the principle of operation is different for transmission electron microscopes (TEM) and scanning electron microscopes (SEM); the latter group also includes scanning transmission electron microscopes (STEM). In the present paper structural examinations (imaging and diffraction) are introduced. Analytical possibilities with special attachments (EDS, EELS) to TEM or STEM are treated in a separate paper in this same volume.