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首页> 外文会议>10th IMEKO symposium : Laser metrology for precision measurement and inspection in industry (LMPMI) 2011 >3D Optical Measuring Technologies for Scientific and Industrial Applications
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3D Optical Measuring Technologies for Scientific and Industrial Applications

机译：适用于科学和工业应用的3D光学测量技术

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摘要

Solving many actual safety problems in science, atomic, optics-mechanical and railway industry takes 3D optical measuring technologies with micro-/ nanometer resolution and productivity from 100 to 10~5 meas./s [1]. The novel results of the R & D activity of TDI SIE SB RAS in this field are presented.
机译：为解决科学，原子，光学机械和铁路行业中的许多实际安全问题，采用了3D光学测量技术，其微米/纳米分辨率和生产率从100到10〜5 meas./s [1]。提出了TDI SIE SB RAS在该领域的研发活动的新成果。

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  • 来源
  • 会议地点 Braunschweig(DE);Braunschweig(DE)
  • 作者

    S. N. Makarov; S. V. Plotnikov; E. V. Sysoev; A. G. Verkhogliad; P.S. Zavyalov; Yu. V. Chugui; A. V. Latyshev; E. S. Senchenko;

  • 作者单位

    Technological Design Institute of Scientific Instrument Engineering, Siberian Branch of the Russian Academy of Sciences (TDI SIE SB RAS), Novosibirsk, Russia;

    Technological Design Institute of Scientific Instrument Engineering, Siberian Branch of the Russian Academy of Sciences (TDI SIE SB RAS), Novosibirsk, Russia;

    Technological Design Institute of Scientific Instrument Engineering, Siberian Branch of the Russian Academy of Sciences (TDI SIE SB RAS), Novosibirsk, Russia;

    Technological Design Institute of Scientific Instrument Engineering, Siberian Branch of the Russian Academy of Sciences (TDI SIE SB RAS), Novosibirsk, Russia;

    Technological Design Institute of Scientific Instrument Engineering, Siberian Branch of the Russian Academy of Sciences (TDI SIE SB RAS), Novosibirsk, Russia;

    Technological Design Institute of Scientific Instrument Engineering, Siberian Branch of the Russian Academy of Sciences (TDI SIE SB RAS), Novosibirsk, Russia, Novosibirsk State University, Novosibirsk State Technical University, Novosibirsk, Russia;

    Novosibirsk State University, Institute of Semiconductor Physics, Siberian Branch of the Russian Academy of Sciences (ISP SB RAS), Novosibirsk, Russia;

    Technological Design Institute of Scientific Instrument Engineering, Siberian Branch of the Russian Academy of Sciences (TDI SIE SB RAS), Novosibirsk, Russia, Novosibirsk State Technical University, Novosibirsk, Russia;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 公差与技术测量及机械量仪;
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