METHOD FOR MANUFACTURING REFINED ORTHO-PERIODIC ACID AQUEOUS SOLUTION, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND ORTHO-PERIODIC ACID AQUEOUS SOLUTION

摘要

PROBLEM TO BE SOLVED: To provide: a method for manufacturing a refined ortho-periodic acid aqueous solution reduced in Cr(chromium) content; a method for manufacturing a semiconductor device, which comprises an etching step of etching a Ru layer formed on a semiconductor substrate with an etchant obtained according to the manufacturing method; and an ortho-periodic acid aqueous solution reduced in Cr content.;SOLUTION: A method for manufacturing a refined ortho-periodic acid aqueous solution comprises: a metal-removing step of bringing a crude ortho-periodic acid aqueous solution containing ortho-periodic acid and water, provided that the content of the ortho-periodic acid is 15 mass% or less to a total mass and 1 mass ppb or more of Cr is included, into contact with a metal-removing agent containing a chelate resin.;SELECTED DRAWING: None