Wire non-defect inspection system, wire non-defect detection device and wire non-defect detection method

摘要

A wire non-defect inspection system 100 of a semiconductor device 10 comprising an ultrasonic oscillator 40 , an ultrasonic vibrator 42 , a camera 45 , a display 48 , a controller 50 , and a controller ( 50) calculates the difference between the image of one frame of the captured moving image and the previous frame before it, and displays the image display of the wire whose difference exceeds a predetermined threshold value differently from the image display of other wires on the display do.