CONTROL PROGRAM, CONTAINER, AND SEMICONDUCTOR DEVICE MANUFACTURING FACILITY FOR CHARGING OF WAFER TYPE SENSOR AND AUTO TEACHING

摘要

To provide a control device for charging and auto teaching of a wafer type sensor, a control program executed by the control device, a wafer type sensor storage device, a wafer type sensor charging device, and a semiconductor device manufacturing facility.SOLUTION: In an auto teaching system 100 including a substrate processing apparatus 110 for processing wafers, a wafer type sensor 120 to inspect a semiconductor device manufacturing facility and its part, a control device 130, a storage device 140 for storing the wafer type sensor 120, and a charging device 150 for charging the wafer type sensor 120, a control program executed by the control device 130 equipped with a processor monitors the semiconductor device manufacturing facility and its part using the wafer type sensor 120 and monitors the remaining battery level of the wafer type sensor.SELECTED DRAWING: Figure 1