Source gas supply system and source gas supply method

摘要

A raw material gas supply system for supplying a raw material gas produced by vaporizing a solid raw material to a processing device, a vaporizing device generating the raw material gas by vaporizing the solid raw material, and a solution storing a solution in which the solid raw material is dissolved in a solvent a delivery mechanism for delivering the solution from a source to the vaporizer; and an evaporation mechanism for evaporating the solvent of the solution delivered from the delivery mechanism and accommodated in the vaporizer to separate the solid raw material.