System for fabricating 3D diffractive optical element on curved surfaces using direct laser lithography

摘要

The present invention relates to an apparatus for manufacturing a 3D diffractive optical device using a laser direct exposure method and automatic rear focus control. A device comprising: a laser exposure apparatus comprising: a laser generator for generating a laser beam having a specific width; and an exposure lens for irradiating the laser beam to the photosensitive film by transmitting the laser beam; a specimen fixing jig having a body and a mount provided on the body and on which the specimen is mounted; and a displacement sensor installed in the lower part of the mount and in the main body and positioned on the optical axis of the laser exposure apparatus, the displacement sensor measuring the position information of the bottom surface of the photosensitive film, and the laser exposure apparatus based on the position information measured by the displacement sensor It relates to a 3D diffraction optical device manufacturing apparatus using a laser direct exposure method and a rear autofocus control, characterized in that it comprises a;