^pof;
Electronic;
Engineering,;
Xiamen;
University,;
Xiamen;
361005,;
China;
^pof;
Physics,;
Xiamen;
University,;
Xiamen;
361005,;
China;
^pKey;
Lab;
of;
Silicon;
Materials,;
Zhefiang;
University,;
Hangzhou;
310027,;
China;
^pInstitute;
of;
Optics;
and;
Fine;
Mechanics,;
Chinese;
Academy;
of;
Sciences,;
Shanghai;
201800,;
China;
DFB激光器; 染料掺杂; 氧化锆; 薄膜制备; 二维; 混合; 软光刻; Nd:YAG激光;