AKTIV GEKÜHLTE ELEKTRONENKANONE ZUR MATERIALVERDAMPFUNG IM VAKUUM

摘要

The present invention relates to an emitter assembly for an electron cannon comprising an actively cooled cathode block and an accelerator anode, preferably annular, wherein the cathode block comprises a heat sink, an emitter assembly and an insulator, which is arranged thermally between the heat sink and the emitter assembly, where the insulator has a thermal conductivity λ greater than or equal to 20 W /(m · K),preferably greater than or equal to 50 W /(m · K) and more preferably greater or equal to 90 W /(m · K).The present invention further relates to an actively cooled beam guiding device for an electron cannon having a beam tube having at least one cooling channel which can be flowed through by a cooling medium, preferably water, and at least one electron-optical component for beam guiding, preferably at least one magnetic coil.Further, the present invention relates to an axial electron cannon comprising an emitter assembly and an actively cooled beam guiding device according to the present invention.