Organic metal compounds, thin film vapor deposition compositions containing organic metal compounds, thin film manufacturing methods using thin film vapor deposition compositions, thin films manufactured from thin film vapor deposition compositions, and semiconductor elements containing thin films.

摘要

To provide a semiconductor device capable of easily producing a semiconductor thin film using a organic metallic compound and having high reliability in electrical characteristics by including the produced thin film.SOLUTION: An organic metallic compound is represented by a chemical formula 1. In the chemical Formula 1, M is Sr or Ba, and A is derived from a compound represented by a chemical formula containing a predetermined alkyl group.SELECTED DRAWING: None