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Substrate foreign matter inspection device and substrate foreign matter inspection method

机译:基板异物检测装置及基板异物检测方法

摘要

PROBLEM TO BE SOLVED: To detect a foreign substance more easily and with very high accuracy. An image data relating to a printed substrate without foreign matter for a neural network having a coding unit that extracts a feature amount from input image data and a decoding unit that reconstructs the image data from the feature amount. Using the AI model 100 generated by training only as training data, the image data obtained by the camera 32D is input to the AI model 100 as the original image data, and the reconstructed image data is acquired as the reconstructed image data. .. The original image data and the reconstructed image data are compared, and the presence or absence of foreign matter on the printed circuit board is determined based on the comparison result. Since it is not necessary to prepare a master substrate for comparison, foreign matter inspection becomes easy. Further, since the shapes and appearances of the printed circuit boards are almost the same in both image data to be compared, foreign matter can be detected with great accuracy. [Selection diagram] Fig. 4
机译:需要解决的问题:更容易、更高精度地检测异物。一种用于神经网络的与无异物印刷基板有关的图像数据,该神经网络具有从输入图像数据中提取特征量的编码单元和从特征量重构图像数据的解码单元。使用仅通过训练生成的AI模型100作为训练数据,将相机32D获得的图像数据作为原始图像数据输入AI模型100,并且获取重建图像数据作为重建图像数据。。比较原始图像数据和重构图像数据,并基于比较结果确定印刷电路板上是否存在异物。由于无需准备主基板进行比较,异物检查变得容易。此外,由于待比较的两个图像数据中的印刷电路板的形状和外观几乎相同,因此可以高精度地检测异物。[选择图]图4

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