Method with improved focus setting considering an image level tilt in a plurality particle beam microscope

摘要

The invention relates to a plurality of particle beam microscopes and an associated method for adjusting an optimal focus plane with optimal resolution and adjusting a telecentric irradiation with the plurality of primary beams. A method is proposed for determining an optimal adjustment plane into which an object surface is brought. Measures are also proposed:which enable improved resolution and telecentric irradiation for a large number of primary beams. The means include a targeted selection and a targeted individual influence of individual primary beams and/or means to influence the plurality of primary beams in a collective manner.