ACCEPTABILITY CHECK METHOD AND CHECK SYSTEM FOR NEWLY-ADDED PRODUCTION TOOLS

摘要

The embodiments of the present application provide an acceptability check method and check system for newly-added production tools. The check method includes: performing, after obtaining several new tool yield data and several old tool yield data, data analysis on the several new tool yield data and the several old tool yield data, determining whether the several new tool yield data and the several old tool yield data belong to a high yield category or a slightly higher yield category, eliminating the corresponding new tool yield data and old tool yield data if “yes”, and taking the remaining new tool yield data and the remaining old tool yield data respectively as screened new tool yield data and screened old tool yield data; determining, based on the screened new tool yield data and the screened old tool yield data, whether the new production tool is acceptable.