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TEMPERATURE DISTRIBUTION EVALUATION METHOD, TEMPERATURE DISTRIBUTION EVALUATION DEVICE, AND SOAKING RANGE EVALUATION METHOD
TEMPERATURE DISTRIBUTION EVALUATION METHOD, TEMPERATURE DISTRIBUTION EVALUATION DEVICE, AND SOAKING RANGE EVALUATION METHOD
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机译:温度分布评价方法,温度分布评估装置和浸泡范围评价方法
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摘要
To provide a new temperature distribution evaluation method, a temperature distribution evaluation device, and a soaking range evaluation method, as the temperature distribution evaluation method which evaluates a temperature distribution of a heating area 40A provided in a heating device 40, the present invention is a temperature distribution evaluation method which, in the heating area 40A, heats a semiconductor substrate 10 and a transmitting and receiving body 20 for transporting a raw material to and from the semiconductor substrate 10, and evaluates a temperature distribution of the heating area 40A on the basis of a substrate thickness variation amount A of the semiconductor substrate 10. Accordingly, temperature distribution evaluation can be implemented for a high temperature area at 1600 - 2200°C or the like at which it is hard to evaluate the temperature distribution due to the limit of a thermocouple material.
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