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Semiconductor inspection and metrology systems for distributing job among the CPUs or GPUs based on logical image processing boundaries

机译:基于逻辑图像处理边界的CPU或GPU之间分配工作的半导体检查和计量系统

摘要

Real-time job distribution software architectures for high bandwidth, hybrid processor computation systems for semiconductor inspection and metrology are disclosed. The imaging processing computer architecture can be scalable by changing the number of CPUs and GPUs to meet computing needs. The architecture is defined using a master node and one or more worker nodes to run image processing jobs in parallel for maximum throughput. The master node can receive input image data from a semiconductor wafer or reticle. Jobs based on the input image data are distributed to one of the worker nodes. Each worker node can include at least one CPU and at least one GPU. The image processing job can contain multiple tasks, and each of the tasks can be assigned to one of the CPU or GPU in the worker node using a worker job manager to process the image.
机译:公开了用于高带宽的实时作业分布软件架构,用于半导体检查和计量的混合处理器计算系统。 成像处理计算机架构可以通过改变CPU和GPU来满足计算需求来缩放。 使用主节点和一个或多个工作节点来定义架构以并行运行图像处理作业以获得最大吞吐量。 主节点可以从半导体晶片或掩模版接收输入图像数据。 基于输入图像数据的作业分布到一个工作节点。 每个工作节点可以包括至少一个CPU和至少一个GPU。 图像处理作业可以包含多个任务,并且可以使用工人作业管理器将每个任务分配给工人节点中的一个CPU或GPU,以处理图像。

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