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Calculating correction factors for subsequent printing operations by weighting measured alignment differences

机译:通过加权测量对准差异计算后续打印操作的校正因子

摘要

A position of a first registration mark printed on a substrate during an earlier printing operation is detected. A second registration mark is printed on the substrate during a current printing operation at a position on the substrate relative to the first registration mark based on the detected position of the first registration mark and a correction factor. An alignment difference between the position of the first registration mark and the position of the second registration mark is measured. A new correction factor for a subsequent printing operation is calculated by weighting the measured alignment difference according to a difference between the measured alignment difference and a previous measured alignment difference.
机译:检测在较早的打印操作期间印刷在衬底上的第一配准标记的位置。 在基板上相对于第一配准标记的位置处的当前打印操作期间在基板上印刷第二登记标记,基于第一配准标记的检测到位置和校正因子。 测量第一配准标记的位置与第二配准标记的位置之间的对准差。 通过根据测量的对准差和先前测量的对准差之间的差异加权测量的对准差来计算随后的打印操作的新校正因子。

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