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Systems and methods for making optical masks for surface microtexturing, and surface microtexturing equipment and methods

机译:用于制造表面微伸张化的光学掩模的系统和方法,以及表面微封面设备和方法

摘要

The present invention relates to a system (2) for manufacturing an optical mask (35) for surface microtexturing, said system (2) comprising: a substrate (10) having a surface (11) to be textured; a material layer 20 covering the surface 11 of the substrate 10 and having an outer surface 21 exposed to an external environment; and creating and depositing droplets 30 in a specific arrangement 31 by condensation on the outer surface 21 of the material layer 20, so that an optical mask ( 35) to form a creation and deposition apparatus. The invention also relates to a treatment plant comprising a system (2) of this type. The present invention also relates to a method for making a mask as well as a method for microtexturing a surface.
机译:本发明涉及一种用于制造用于表面微卷尺的光掩模(35)的系统(2),所述系统(2)包括:具有纹理(11)的基板(10)。 覆盖基板10的表面11并具有暴露于外部环境的外表面21的材料层20; 并通过在材料层20的外表面21上的冷凝在特定装置31中形成和沉积液滴30,使得光学掩模(35)形成制造和沉积设备。 本发明还涉及一种处理厂,其包含这种类型的系统(2)。 本发明还涉及一种制造掩模的方法以及用于微卷积表面的方法。

著录项

  • 公开/公告号KR102348255B1

    专利类型

  • 公开/公告日2022-01-06

    原文格式PDF

  • 申请/专利权人

    申请/专利号KR1020187037139

  • 申请日2017-06-21

  • 分类号G03F7/20;G03F1/68;

  • 国家 KR

  • 入库时间 2022-08-24 23:25:54

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