Neural interface probe employing amorphous silicon carbide

摘要

A neural interface device that comprises an implantable microelectrode body. The implantable microelectrode body includes a neural interface probe, which includes a thin film metal trace connected to an interface pad and an amorphous silicon carbide insulation. The amorphous silicon carbide insulation surrounds the thin film metal trace to form an outside surface of the neural interface probe. The interface pad is exposed to an ambient environment of the neural interface probe through an opening in the amorphous silicon carbide insulation. Methods of manufacturing the neural interface device are disclosed.