ULTRAVIOLET LIGHT GENERATION TARGET, METHOD FOR MANUFACTURING ULTRAVIOLET LIGHT GENERATION TARGET, AND ELECTRON-BEAM-EXCITED ULTRAVIOLET LIGHT SOURCE

摘要

An ultraviolet light generation target includes a light emitting layer. The light emitting layer contains a YPO4 crystal to which at least scandium (Sc) is added, and receives an electron beam to generate ultraviolet light. Further, a method of manufacturing the ultraviolet light generation target includes a first step of preparing a mixture containing yttrium (Y) oxide, Sc oxide, phosphoric acid, and a liquid, a second step of evaporating the liquid, and a third step of firing the mixture.