Equipment and technology for encapsulation of electronic devices

摘要

PROBLEM TO BE SOLVED: To provide an apparatus and a technique for encapsulating an electronic device. Devices and techniques for use in the manufacture of light emitting devices, such as organic light emitting diode (OLED) devices, include the use of one or more modules with a controlled environment. Can be done. A controlled environment can be maintained at near or above atmospheric pressure. The module prints or separately deposits a patterned organic layer to provide a variety of processing areas and one or more of the OLED devices, such as the organic encapsulating layer (OEL) of the OLED device. It can be arranged to facilitate that. In embodiments, uniform support for the substrate, at least partially, using a gas cushion, such as between one or more of the printing, holding, or curing operations, including the OEL processing process. Can be provided. [Selection diagram] Fig. 3A